JPH0731869Y2 - 真空パット - Google Patents

真空パット

Info

Publication number
JPH0731869Y2
JPH0731869Y2 JP1989130971U JP13097189U JPH0731869Y2 JP H0731869 Y2 JPH0731869 Y2 JP H0731869Y2 JP 1989130971 U JP1989130971 U JP 1989130971U JP 13097189 U JP13097189 U JP 13097189U JP H0731869 Y2 JPH0731869 Y2 JP H0731869Y2
Authority
JP
Japan
Prior art keywords
pad
seal member
housing
plate material
ball
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1989130971U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0370835U (en]
Inventor
卓史 安田
Original Assignee
株式会社アマダメトレックス
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社アマダメトレックス filed Critical 株式会社アマダメトレックス
Priority to JP1989130971U priority Critical patent/JPH0731869Y2/ja
Publication of JPH0370835U publication Critical patent/JPH0370835U/ja
Application granted granted Critical
Publication of JPH0731869Y2 publication Critical patent/JPH0731869Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Delivering By Means Of Belts And Rollers (AREA)
JP1989130971U 1989-11-13 1989-11-13 真空パット Expired - Lifetime JPH0731869Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989130971U JPH0731869Y2 (ja) 1989-11-13 1989-11-13 真空パット

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989130971U JPH0731869Y2 (ja) 1989-11-13 1989-11-13 真空パット

Publications (2)

Publication Number Publication Date
JPH0370835U JPH0370835U (en]) 1991-07-17
JPH0731869Y2 true JPH0731869Y2 (ja) 1995-07-26

Family

ID=31678504

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989130971U Expired - Lifetime JPH0731869Y2 (ja) 1989-11-13 1989-11-13 真空パット

Country Status (1)

Country Link
JP (1) JPH0731869Y2 (en])

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5926021B2 (ja) * 2011-09-26 2016-05-25 新日本無線株式会社 半導体素子搬送ヘッド

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH047910Y2 (en]) * 1986-04-25 1992-02-28

Also Published As

Publication number Publication date
JPH0370835U (en]) 1991-07-17

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